Title
of Publication |
Author(s) |
Name of
Journal |
Published Paper |
| A High Speed MEMS Grating Laser Scanner with a Backside Thinned Grating Platform Fabricated Using Single Mask Delay Etching (SMDE) Technique |
Yu Du (NUS/IME), Guangya Zhou (NUS), Kelvin Koon Lin Cheo (NUS), Qingxin Zhang, Hanhua Feng, Fook Siong Chau (NUS) |
Journal of Micromechanics and Microengineering. Published in 20 (2010), 115028 (11 pp) on 18 Oct 10. |
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| A Micromachined Electrostatic Double Layer Vibratory Grating Scanner for High Speed, High Resolution Laser Scanning |
Yu Du (NUS/IME), Guangya Zhou (NUS), Koon Lin Cheo (NUS), Qingxin Zhang, Hanhua Feng, Fook Song Chau (NUS) |
Journal of Microelectromechanical Systems. Published in vol. 19, No. 5, October 2010. |
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| A Two Wafer Approach for Integration of Optical MEMS and Photonics on Silicon Substrate |
Q X Zhang, J Zhang, M B Yu, Chee Wei Tan, G Q Lo and D L Kwong |
IEEE Photonics Technology Letters. Published in Vol. 22, No. 5, 1 March 2010. |
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| A Silicon Platofrm with MEMS Active Alighment Function and its Potential Application in Si-Photonics Packaging |
Q X Zhang, Y Du, C W Tan, J Zhang, M B Yu, WG Yeoh, G Q Lo and D L Kwong |
IEEE Journal of Selected Topics in Quantum Electronics. Published in Vol. 16, No. 1, January/February 2010. |
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| A 2-DOF Circular Resonator Driven In-Plane Vibratory Grating Laser Scanner |
Yu Du (NUS/IME), Guangya Zhou (NUS), Koon Lin Cheo (NUS), Qingxin Zhang, Hanhua Feng and Fook Siong Chau (NUS) |
IEEE Journal of Microelectromechanical Systems. Published in vol. 18, No. 4, August 2009. |
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| Integration of High-k Dielectrics and Metal Gate on Gate-All-Around Si-Nanowire Based Architecture for High Speed Non-volatile Charge Trapping Memory |
J Fu (IME/NUS), N Singh, C X Zhu (NUS), G Q Lo and D L Kwong |
IEEE Electron Device Letters. Published in Vol. 30, No. 6, June 2009. |
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| Germanium-Rich SiGe Nanowires Formed Through Oxidation of Patterned SiGe FINs on Insulator |
S. Balakumar, K.D. Buddharaju, B. TAN, S.C. Rustagi,N. Singh, R. Kumar,G.Q. Lo, S. Tripathy and D.L. Kwong |
Journal OF Electronic Materials Volume: 38 Issue: 3 Pages: 443-448. Published: MAR 2009 |
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| The Chemistry of Gate Dielectric Breakdown |
X Li (IME/NTU), C H Tung, K L Pey (NTU) and V L Lo (NTU) |
IEEE International Electron Devices Meeting, 15 - 17 Dec 2008, USA. Published pages 779 - 782. |
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| Development of Tapered Silicon Micro-Micromachining Process for 3-D Microsystems Packaging |
N Ranganathan (IME/NTU), L Dayong, L Ebin, N Balasubramanian, K Prasad (Auckland University of Technology), K L Pey (NTU) |
Journal of Micromechanics and Microengineering. Published in 18 (2008) on 15 Oct 08. |
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| Integration of RF MEMS and CMOS IC on Printed Circuit Board for A Compact RF System Application Based on Wafer Transfer |
Q X Zhang, A B Yue, R Yang, H Y Li, L H Guo, E B Liao, M Tang, G Q Lo, N Balasubramanian and D L Kwong |
IEEE Transaction on Electron Devices. Published in vol. 55, No. 9, September 2008, pages 2484 - 2491. |
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| A 2-DOF Circular-Resonator-Driven In-Plane Vibratory Grating Laser Scanner |
Yu Du, Guangya Zhou, Koon Lin Cheo, Qingxin Zhang, Hanhua Feng, and Fook Siong Chau |
Journal Of Micromechanical Systems. Published in Vol: 18 Issue: 4 Pages: 892-904 Published: Aug 2009 |
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| Silicon Nanopillar Substrates for Enhancing Signal Intensity in DNA Microarrays |
B Ramana Murthy, J K K Ng (NUS), E S Selamat (NUS), N Balasubramanian and W T Liu (IME/NUS) |
Biosensors and Bioelectronics. Published in 24 (2008) pages 723 - 728. |
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| The Nature of Dielectric Breakdown |
X Li (IME/NTU), C H Tung and K L Pey (NTU) |
Applied Physics Letters. Published in 92, 072903 (2008). |
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| A Silicon-on-Glass Single-Pole Double-Throw (SPDT) Switching Circuit Integrated with Silicon-Core Metal-Coated Transmission Line |
M Tang (NTU/IME), A Q Liu (NTU) and J Oberhammer (Royal Institute of Technology) |
Journal of Micromechanics and Microengineering. Published in 18 (2008) 095024 (9pp). |
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| Fabrication ofThick Germanium-on-Insulator (GeOI) Substrates |
S Balakumar, K M Hoe, G Q Lo, R Kumar, N Balasubramanian, Y L Foo (IMRE), S Tripathy (IMRE)and D L Kwong |
Journal of Electronic Materials. Published in Vol. 37, No. 7, July 2008. |
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| Development and Characterization of High Aspect Ratio Silicon Etch Process for 3D-Microsystems |
N Ranganathan (IME/NTU), K Prasad (Auckland University of Technology), N Balasubramanian, S C Hwee, K L Pey (NTU) |
Journal of Micromechanics and Microengineering. Published pages 1 - 13 in 18 (2008) on 9 June 2008. |
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| Integration of High Aspect Ratio Tapered Silicon Via for Through-Silicon Interconnection |
N Ranganathan, Liao Ebin, Linn Linn, Lee Wen Sheng Vincent, O K Navas, V Kripesh and N Balasubramanian |
ECTC 2008. 27 - 30 May 2008, Florida USA. Published pages no. 859 - 865. |
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| A Wide Band Scalable and SPICE-Compatiable Model for On-Chip Interconnects Up to 110 GHz |
Kai Kang, Lan Nan (NUS), Subhash Chander Rustagi, Koen Mouthaan (NUS), Jinglin Shi, Rakesh Kumar, Wen-Yan Yin (Shanghai Jiao Tong University) |
IEEE Trans. Microwave Theory and Techniques. Published in vol. 56, No. 4, April 08. |
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| Novel Integration of Metal-Insulator-Metal (MIM) Capacitors Comprising Perovskite-Type Dielectric and Cu Bottom Electrode on Low-Temperature Packaging Substrates |
E B Liao, T H Choong (NTU), W G Zhu (NTU), KW Teo, P C Lim (IMRE), G Q Lo and D L Kwong |
IEEE Electronic Device Letters. Published in Vol. 29, No. 1, January 2008. |
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| SPICE Compatible Modeling of On-chip Coupled Interconnects |
Rakesh Kumar (IME), Kai Kang (IME), Subhash C Rustagi (IME), K Mouthaan (NUS) and T K S Wong (NTU) |
IEE Electronics Letters. Published on 22 Nov 2007, Vol. 43, No. 24. |
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| A Novel Approach to Fabricate - 120 nm Thick Fully Relaxed Ge-on-Insulator |
S Balakumar, K M Hoe, W Tang, Y L Foo (IMRE), S Triphathy (IMRE), C H Tung, G Q Lo, N Balasubramanian and D L Kwong |
International Conference on Solid State Devices and Materials, 18 - 21 Sep 2007, Japan. |
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| Characterisation and Modeling of CMOS On-Chip Coupled Interconnects |
Rakesh Kumar, Subhash, C Rustagi, Kai Kang; K Mouthaan (NUS) and T K S Wong (NTU) |
European Solid-State Device Research Conference, 11-13 September 2007. |
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| Strained N-Channel Transistor with Silicon Source and Drain Regions and Embedded Silicon-Germanium as Strain-Transfer-Structure |
Kah-Wee Ang (NUS/IME), Chih-Hang Tung, N Balasubramanian, Ganesh S Samudra (NUS) and Yee-Chia Yeo (NUS) |
IEEE Electron Device Letters. Published in Vol. 28, No. 7, July 2007. |
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| GaAs Metal-Oxide Semiconductor Device with HfO2/TaN Gate Stack and Thermal Nitridation Surface Passivation |
Fei Gao (NUS/IME), S J Lee (NUS/IME), D Z Chi (IMRE), S Balakumar and D L Kwong |
Applied Physics Letters. Published in 90, 252904 (2007). |
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| Fabrication of Thick SiGe-on-Insulator (si0.2Ge0.8OI) by condensation of SiGe/Si Super Lattice Grown on Silicon-on-Insulator |
S Balakumar, K M Hoe, G Q Lo, R Kumar, N Balasubramanian, D L Kwong, Y L Foo and S Tripathy (IMRE) |
Applied Physics Letters. Published 90, 192113 (2007). |
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| Analysis of Ultra-Thin Low Temperature SiGe Buffer For The Growth of High Quality Strain-Relaxed Ge on Si (100) by UHVCVD |
T H Loh, H S Nguyen, C H Tung, A D Trigg, G Q Lo and S Tripathy (IMRE) |
Applied Physics Letter. Published in 90, 092108 (2007). |
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| Vertically Stacked SiGe Nanowire Array Channel CMOS Transistors |
W W Fang, N Singh, L K Bera, H S Nguyen, S C Rustagi, G Q Lo, N Balasubramanian and D L Kwong |
IEEE Electron Device Letters. Published in vol. 28, No. 3, March 2007. |
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| RF, DC, and Reliability Performance of Embedded MIM Capacitors on Organic Substrates for System-on-Package Applications |
E B Liao, H Y Li, L H Guo, R Kumar, G Q Lo, N Balasubramanian and D L Kwong |
IEEE Transaction on Electron Devices. Published in Vol. 54, No. 3, March 2007. |
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| Fabrication Technology of Si Micro-Fluidic Devices for Microbial Cell Trapping |
Ramana Murthy Badam, Liang Zhu, Cheng Yong Teo, Xueli Peh, Hanhua Feng and Wen-Tso Liu |
SPIE Photonic West 2007, 20 - 25 January 2007, San Jose, California, USA. Published in Proceedings of SPIE Vol. 64620E-2. |
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| Light-Speed Optical Control With a Nano-Opto-Electronic Device |
Selin H G Teo, J Singh, M B Yu, J B Zhang, L P Shi, M H Hong and Liu Ai Qun |
IEEE MEMS, 21 - 25 Jan 2007. |
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| SiGeO Layer Formation Mechanism At The SiGe/Oxide Interfaces During Ge Condensation |
S Balakumar, Suo Peng, Hoe K M, A Agarwal, Lo G Q, N Balasubramanian, D L Kwong and S Tripathy |
Applied Physics Letters. Published in 90, 032111 (2007). |
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