Selected Publications

ICS Publication | IPP Publication | FAB Publication | MDRA Publication | NanoE Publication | NanoP Publication | MEMS Publication | SAM Publication | Bioelectronics Publication| MMD Publication| RuggedE Publication

Title of Publication

Author(s) Name of Journal
The Mesa Merging Oxidation method for Creating Low-Loss Dielectics and Transmission Lines on Low Resistivity Silicon Shane T Todd, N C MacDonald (University of California), J E Bowers (University of California) Journal of Micromechanics and Microengineering. Published in 21 (2011) 065020 (10pp).
A MEMS Micro-Reed Switch with One Reed Embedded in the Silicon Substrate Min Tang, Yong Hean Lee, Rakesh Kumar (GLOBALFOUNDRIES Singaproe Pte Ltd), Ravi Shankar (ST Microelectronics Asia Pacific Pte Ltd), Oliver Le Nell (ST Microelectronics Asia Pacific Pte Ltd), Giuseppe Noviello (ST Microelectronics Asia Pacific Pte Ltd) Journal of Microelectromechanical Systems. Published in vol. 20, No. 6, Dec 2011, pages 1336 - 1344.
Microfabrication and Characterization of W-Band Planar Helix with Straight-Edge Connections Slow-Wave Structure Ciersiang Chua (NTU/IME), Julius M Tsai, Sheel Aditya (NTU), Min Tang, Zhongxiang Shen (NTU), Lei Wang IEEE Transactions on Electron Devices. Published in Vol. 58, No. 11, November 2011.
Compact Electrode Design for in-Plance Accelerometer on SOI with Refilled Isolation Trench Jin Xie, Rahul Agarwal, Youhe Liu, Julius Minglin Tsai, N Ranagathan, Janak Singh Journal of Micromechanics and Microengineering. Published in 21 (2011) 095005 (9pp).
Experimental Investigation of Cavity-Mode Resonator Using Micromachined Two-Dimensional Silicon Phononic Crystal of Square Lattice Nan Wang (IME/NUS), J M Tsai, Fu-Li Hsiao (National Changhua University of Education, Taiwan), B W Soon, Dim-Lee Kwong, Moorthi Palaniapan (NUS), Chengkuo Lee (NUS) IEEE Electron Device Letters. Published in Vol. 32, No. 6, June 2011.
Compact Electrode Design for Accelerometer on SOI with Refilled Isolation Trench Jin Xie, Rahul Agarwal, Youhe Liu, Julius Minglin Tsai, Nagarajan Ranganathan Transducers 2011, 5 - 9 June 2011, Beijing China.  Published pages no. 76 - 79.
A MEMS Micro-Reed Switch Designed for Portable Applications Min Tang, Yong Hean Lee, Rakesh Kumar, Ravi Shankar (ST Microelectronics Pte Ltd), Olivier Le Neel (St Microelectronics Pte Ltd) Transducers 2011, 5 - 9 June 2011, Beijing China.  Published in pages no. 2847 - 2850.
Piezoelectric AIN MEMS Resonators with High Coupling Coefficient Lynn Khine, Jeffrey B W Soon, Julius M Tsai Transducers 2011, 5 - 9 June 2011, Beijing China.  Published pages no. 526 - 529.
Vertical Silicon Nano-Pillar for Non-Volatile Memory V X H Leong, E J Ng (IME/Stanford University), J B W Soon, N singh, N Shen, T Myint, V Pott, J M Tsai Transducers 2011, 5 - 9 June 2011, Beijing China.  Published pages no. 649 - 652.
High Throughput Melting Curve Analysis (MCA) in Monolithic Silicon-Based Microfluidic Device Soon Bo Woon Jeffrey, Pavel Neuzil (IME/KIST Europe), Cheng Fang, Julien Reboud (University Glasgow),  Chee Chung Wong (NTU) and Kao Tzu-Hsiang Linus MicroTAS, 3 - 7 October 2010, The Netherlands.  Published pages 608 - 610.
A Magnetostatic MEMS Relay Designed for Portable Applications Min Tang, Ebin Liao, Cheng Cheng Kuo JK, Dayong Lee, Rakesh Kumar, Yong Hean Lee, Ravi Shankar (ST Microelectronics Asia Pacific Pte Ltd), Oliver Le Nell (ST Microelectronics Asia Pacific Pte Ltd), Giuseppe Noviello (ST Microelectronics Asia Pacific Pte Ltd) and Francesco Italia (ST Microelectronics Asia Pacific Pte Ltd) Journal of Microelectromechanical Systems.  Published in Vol. 19, No. 5, October 2010, pages 1131 - 1139.
A MEMS Rotary Comb Mechanism for Harvesting the Kinetic Energy of Planar Vibrations Bin Yang (NUS), Chengkuo Lee (NUS/IME/), Rama Krishna Kotlanka, Jin Xie, Siak Piang Lim (NUS) Journal of Micromechanics and Microengineering.  Published on 14 May 2010, 20 (2010), 065017 (11 pp)
Design, Fabrication and Characterization of CMOS MEMS Based Thermoelectric Power Generators Xie Jin, Lee Chengkuo (IME/NUS) and Hanhua Feng IEEE Journal of Microelectromechanical Systems. Published in Vol. 19, No. 2, April 2010.
Wafer-Level Vacuum Sealing and Encapsulation for Fabrication of CMOS MEMS Thermoelectric Power Generators Jin Xie, Chengkuo Lee (IME/NUS), Ming-Fang Wang and Hanhua Feng IEEE MEMS Conference 2010, 24 - 28 Jan 2010, Hong Kong China.  PP 1175 - 1178.
Micromachined Passive Magnetostatic Relays for Portable Application Min Tang, Ebin Liao, Dayong Lee, Rakesh Kumar, Yong Hean Lee, Cheng Cheng Kuo JK, Ravi Shankar (ST Microelectronics Asia Pacific Pte Ltd), Olivier Le Neel (ST Microelectronics Asia Pacific Pte Ltd), Giuseppe Noviello (ST Microelectronics Asia Pacific Pte Ltd) and Franceso Italia (ST Microelectronics Asia Pacific Pte Ltd) IEEE MEMS Conference 2010, 24 - 28 Jan 2010, Hong Kong China. PP 779 - 782.
Theoretical Comparsion of Energy Harvesting Mechanisms Based on Electrostatic Schemes Chengkuo Lee (NUS/IME), Ye Mei Lim (NUS), Bin Yang, Rama Krishna Kotlanka, Chun-Huat Heng (NUS), Johnny Han He, Min Tang, Jin Xie and Hanhua Feng Sensors & Actuators: A Physcial. Published in 156 (2009) PP 208 - 216.
Characterization of Heavily Doped Polysilicon Films for CMOS MEMS Thermoelectric Power Generators Jin Xie, Chengkuo Lee (IME/NUS), Ming-Fang Wang, Youhe Liu and Hanhua Feng Journal of Micromechanics and Microengineering. Published in 19 (2009) 125029 (8pp).
Electromagnetic Energy Harvesting from Vibrations of Multiple Frequencies Bin Yang, Chengkuo Lee (IME/NUS), Wenfeng Xiang (NUS), Jin Xie, Johnny Han He, Rama Krishna Kotlanka and Hanhua Feng Journal of Microelectromechanical Systems.  Published in 19 (2009) 035001(8pp) 30 Jan 2009 online.
Biomicrofluidics Lab-on-Chip Device for Cancer Cell Detection Johnny H He, Julien Reboud Hongmiao Ji, Liang Zhu, Li Zhang, Yi Long and Chengkuo Lee Applied Physics Letters. Published in 93, 223905 (2008).
Design and Development of a 3D Scanning MEMS OCT Probe Using a Novel SiOB Package Assembly Y Xu (IME/NUS), J Singh, C S Premachandran, K W S Chen, A K B Ratmin, N Chen (NUS), C J R Sheppard (NUS) and M Olivo (NCC) Journal of Micromechanics and Microengineering.  Published in 18 (2008)125005 on 30 Oct 08.
Si Nanophotonics Based Cantilever Sensor Chengkuo Lee (NUS/IME), Jayaraj Thillaigovindan (NUS), Chii-Chang Chen (National Central University, Taiwan), Xian Tong Chen, Ya-Ting Chao (Yuan Ze University, Taiwan), Shaohua Tao, Wenfeng Xiang (NUS), Aibin Yu, Hanhua Feng and G Q Lo Applied Physics Letters.  Published in 93, 113113 (2008).
A Silicon-on-Glass Single-Pole Double-Throw (SPDT) Switching Circuit Integrated with Silicon-Core Metal-Coated Transmission Line M Tang (NTU/IME), A Q Liu (NTU) and J Oberhammer (Royal Institute of Technology) Journal of  Micromechanics and Microengineering.  Published in 18 (2008) 095024 (9pp).
Silicon/Glass BioMEMS Microfluidics Device for Cancer Cell Detection J H He, J Reboud, H M Ji, L Zhu, L Zhang, Y Long (NTU), N Balasubramanian and Chengkuo Lee (IME/NUS),  Eurosensors 2008, 7 - 10 Sep 2008, Germany.  Published pages no. 723 to 726.
Modeling of Two -Axis Gimbal-Less Scanning Micromirror Yingxhun Xu (IME/NUS), Janak Singh and Nanguang Chen (NUS) Eurosensors 2008, 7 - 10 Sep 2008, Germany.  Published pages no. 56 to 59.
Design, Simulation and Characterization of A Novel Multi-Frequency Energy Harvester Bin Yang, Chengku Lee (IME/NUS), Johnny Han He, Jin Xie, Rama Krishna Kotlanka and Hanhua Feng  Eurosensors 2008, 7 - 10 Sep 2008, Germany.  Published pages no. 1408 to 1411.
Inertial MEMS Energy Harvester Using Rotary Comb Rama Krishna Kotlanka, Chengkuo Lee (IME/NUS), Bin Yang, Jun Wei Tan (IME/NUS), Johnny Han He, Min Tang and Hanhua Feng Eurosensors 2008, 7 - 10 Sep 2008, Germany.  Published pages no. 1412 to 1415.
Theoretical Comparsion of Energy Harvesting Mechanisms Based on Electrostatic Schemes Chengkuo Lee (NUS/IME), Ye Mei Lim (NUS), Rama Krishna Kotlanka, Bin Yang and Hanhua Feng  Eurosensors 2008, 7 - 10 Sep 2008, Germany.  Published pages no. 1403 - 1407.
High-Q on-Chip-Inductors Using Extremely Thick Silicon Dioxide and Copper-Damascene Technology M Tang, H Y Li, Q X Zhang, E B Liao, A B Yu, G Q Lo, N Balasubramanian and D L Kwong IEE Electronics Letters.  Published on 31 Jan 2008, Vol. 44, No. 3.
A Two Axes Scanning SOI MEMS Micromirror for OCT Probe BioImaging J Singh, J H S Teo, Y Xu (IME/NUS), C S Premachandran, N Chen (NUS), R Kotlanka, M Olive (National Cancer Centre), C J Sheppard (NUS) Journal of Micromechanics and Microengineering.  Published in 18 (2008) 025001on 11 Dec 2007.
Manipulations of Bio-Molecules Inside Discrete Droplets with Droplet Controls by Optical Imaging Leng Kin Lao, Chengkuo Lee (IME/NUS) and Hanhua Feng microTAS 2007, 7 - 11 Oct 2007, Paris, France.  
A Low-Loss Single-Pole Double-Throw (SPDT) Switch Circuit M Tang (IME/NTU), A Q Liu (NTU) and A Agarwa Transducer 07 & Euronsensors XXI, 10 - 14 June 2007
A Wafer Transfer Technology for Integration of RF MEMS and CMOS on Organic Substrate Q X Zhang, A B Yu, M Tang, H Y Li, R Yang, E B Liao, L H Guo, R Kumar, A Q Liu (NTU), G Q Lo, N Balasubramanian and D L Kwong Transducer 07 & Euronsensors XXI, 10 - 14 June 2007
Ultra Long Superresolution BEBM By Multi-Zone Rotationally Symmetrical Complex Pupil Filter Y S Xu (NUS/IME), J Singh, C J R Sheppard (NUS) and N G Chen (NUS) Optics Express.  Published on 14 May 07, Vol. 15, No. 10.
Optical Coherent Tomography Bio-Imaging Using 3D Scanning Micromirror Janak Singh, Chan Chee Hoe, Teo Hui Siang Jason, Chen Nanguang, C S Premachandran, Colin JR Sheppard and Malini Olivo SPIE Photonic West 2007, 20 - 25 Jan 2007, San Jose, CA, USA.  Published in Proc. Of SPIE Vol. 6432, 64320C (2007).
A Single-Mask Substrate Transfer Technique for Fabrication of High-Aspect-Ratio Micromachined Structures M Tang (NTU/IME), A Q Liu (NTU), A Agarwal and M H Habib (NTU) Journal of Micromechanics and Microengineering.  Published pages no. 1575 0 1582.

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