Patents

Patents | ICS Patents | MMC Patents

SPT Patents


US Pat 7,244,674 Process of forming a composite diffusion barrier in copper/organic low-k damascene technology
US Pat 7,203,387 VLSI-photonic heterogeneous integration by wafer bonding
US Pat 7,164,837 Method of fabricating optical waveguide devices with smooth and flat dielectric interfaces
US Pat 7,162,133 Method To Trim And Smooth High Index Contrast Waveguide Structures
US Pat 7,002,175 Method of Making Resonant Tunneling Diodes and CMOS Backend-Process-Compatible Three Dimensional (3-D) Integration
US Pat 6,990,327 Wideband monolithic tunable high-Q notch filter for image rejection in RF application

US Pat 6,913,994

Method to form Cu/OSG dual damascene structure for high performance and reliable interconnects

US Pat 6,908,825

Method of making an integrated circuit inductor wherein a plurality of apertures are formed beneath an inductive loop

US Pat 6,872,657

Method to form copper seed layer for copper interconnect

US Pat 6,849,293

Method to minimize iso-dense contact or via gap filling variation of polymeric materials in the spin coat process

US Pat 6,846,725

Wafer-Level Package for Micro-Electro-Mechanical Systems

US Pat 6,846,720

Method to reduce junction leakage current in strained Silicon on Silicon-Germanium devices

US Pat 6,743,713

Method of forming dual damascene pattern using dual bottom anti-reflective coatings (barc)

US Pat 6,730,591

Method of using silicon rich carbide as a barrier material for fluorinated materials

US Pat 6,716,570

Low temperature resist trimming process

US Pat 6,667,516

RF LDMOS on Partial SOI Substrate

US Pat 6,664,596

Stacked LDD High Frequency LDMOSFET

US Pat 6,617,241

Method of Thick Film Planarization

US Pat 6,551,937

Process for device using partial SOI

US Pat 6,534,374

Single damascene method for RF IC Passive component integration in copper interconnect process

US Pat 6,495,903

Integrated circuit inductor

US Pat 6,489,203

Stacked LDD high frequency LDMOSFET

US Pat 6,472,962

Inductor-capacitor resonant RF switch

US Pat 6,468,906

Passivation of copper interconnect surfaces with a passivating metal layer

US Pat 6,468,853

Method of fabricating a shallow trench isolation structure with reduced local oxide recess near corner

US Pat 6,461,902

RF LDMOS on partial SOI substrate

US Pat 6,436,810

Bi-layer resist process for dual damascene

US Pat 6,433,325

Apparatus and method for image enhancement

US Pat 6,429,129

Method of using silicon rich carbide as a barrier material for fluorinated materials

US Pat 6,424,044

Use of boron carbide as an etch-stop and barrier layer for copper dual damascene metallization

US Pat 6,387,798

Method of etching trenches for metallization of integrated circuit devices with a narrower width than the design mask profile

US Pat 6,383,855

High speed, low cost BiCMOS process using profile engineering

US Pat 6,352,921

Use of boron carbide as an etch-stop and barrier layer for copper dual damascene metallization

US Pat 6,242,344

Tri-layer resist method for dual damascene process

US Pat 6,235,591

Method to form gate oxides of different thicknesses on a silicon substrate

US Pat 6,222,187

Multiwavelength imaging and spectroscopic photoemission microscope system

US Pat 6,200,887

Method to form a smooth gate polysilicon sidewall in the fabrication of integrated circuits

US Pat 6,133,079

Method for reducing substrate capacitive coupling of a thin film inductor by reverse p/n junctions

US Pat 6,121,616

Combined infrared and visible light spectroscopic photoemission microscope

US Pat 6,100,195

Passivation of copper interconnect surfaces with a passivating metal layer

US Pat 6,096,604

Production of reversed flash memory device

US Pat 5,991,044

Method and apparatus for determining characteristics of microstructures utilizing micro-modulation reflectance spectrometry

US Pat 5,851,925

Staining technique for semiconductor device for SEM exposure

US Pat 5,801,083

Use of polymer spacers for the fabrication of shallow trench isolation regions with rounded top corners


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