Microsystems, Modules & Components (MMC)

Triggered by the increasing needs for low-cost, miniaturised, fast and innovative product creation and to broaden the product portfolio of wafer fabs, IME is focusing its micro/nano packaging research and development on 3D stacking, through silicon via (TSV) technology, low-temperature wafer-to-wafer bonding, MEMS, photonics, Cu/ultra low-k devices, embedded wafer level modules, embedded active and passive device in substrate/PCB, electrical, thermal, mechanical design, materials, process and reliability.

The Microsystems, Modules and Components (MMC) Lab at IME has identified the following strategic research areas of focus. We have also established several industry programmes with local and overseas universities and research institutes to meet the long term milestones.

Research Areas


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