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Micro-Electro-Mechanical Systems (MEMS) Programme IME's MEMS programme is one of the earliest of its kind started in this region and has continuously grown over the last 10 years. The progamme focuses on R&D activities in the area of Si-based MEMS devices for various applications. MEMS is currently used in low- or medium-volume applications. The main obstacle preventing its wider adoption is that most companies who wish to explore the potential of MEMS have limited options for prototyping or manufacturing devices, as well as limited expertise in micro-fabrication technology. IME's MEMS programme serves as an important mechanism in giving smaller organisations a responsive and affordable access to MEMS technology. IME houses an advanced 200 mm Si CMOS fabrication facility with MEMS-specific process technology and advanced packaging capabilities, as well as analog and mixed IC design. Combining on-chip electronics and advanced MEMS technology, several projects are currently being carried out internally and in collaboration with the industry and academia on topics such as optical, inertial and RF MEMS for applications towards biometrics, medical technology, consumer electronics, display and communication. The R&D programmes are driven substantially by commercial applications as the end goal.
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